ZR-G08 High Pressure Diffuser
Overview
ZR-G08 High pressure diffuser is an accessory designed for Junray 28.3L/min or 100L/min particle counter to measure particle concentration in high pressure compressed gas.
Compressed gas will reduce to atmospheric pressure then enter particle counter. It is suitable for measuring particle contamination in compressed gas system.
Standards
• ISO 14644-1
• ISO 8573
• SEMI 49.8
Features
• High cleanliness grade parts, no interference or pollution to the original gas pipeline.
• Stable air flow output, minimizing the impact on the accuracy of particle counter.
• Suitable for measuring clean, dry and non-toxic inert gases.
• Stainless steel material, easy to clean and resist cleanroom chemicals.
• Protected by HEPA filter from contaminant.
Connection
Packing List
|
Parameter |
ZR-G08A |
ZR-G08B |
|
Input pressure |
0.54-0.7MPa |
0.6-0.7 MPa |
|
Output flow |
100 L/min |
28.3 L/min |
|
Material |
304 stainless steel |
304 stainless steel |
|
Applicable gas |
Clean dry air and non-toxic inert gas |
Clean dry air and non-toxic inert gas |
|
Operating temperature |
(10~35) ℃ |
(10~35) ℃ |
|
Operating humidity |
(30~80) %RH |
(30~80) %RH |
|
Size |
(Length 280 × width 40 × height 80) mm |
(Length 280 × width 40 × height 80) mm |
|
Weight |
about 1.2 kg |
about 1.2 kg |